• P.B.S.® Pad Conditioners

CMP - Pad Conditioning (PBS)Exceptional diamond tools for exceptional CMP pad conditioning

The P.B.S.® plating process dramatically increases diamond retention due to its unique method of bonding the individual diamonds to the disk.

Product Features:

  • Strong, premium quality diamond
  • Strong bond between crystal and substrate
  • Consistent pad conditioning
  • Lowest cost of ownership
  • Product certification

ATI's pad conditioners are available for all CMP equipment including:

  • Applied Materials
  • Ebara
  • Speedfam-IPEC
  • Strasbaugh
  • Lam Research
Learn more about our P.B.S.® Pad Conditioners for In-situ Metal CMP Processes >>
Learn about our Infinity v6.1™ Optimized Pad Conditioners >>

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